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BiBTeX citation export for MOPA62: High Quality Conformal Coatings on Accelerator Components via Novel Radial Magnetron with High-Power Impulse Magnetron Sputtering

@inproceedings{huber:napac2022-mopa62,
  author       = {W.M. Huber and I. Haehnlein and T.J. Houlahan and B.E. Jurczyk and A.S. Morrice and R.A. Stubbers},
  title        = {{High Quality Conformal Coatings on Accelerator Components via Novel Radial Magnetron with High-Power Impulse Magnetron Sputtering}},
& booktitle    = {Proc. NAPAC'22},
  booktitle    = {Proc. 5th Int. Particle Accel. Conf. (NAPAC'22)},
  pages        = {182--184},
  eid          = {MOPA62},
  language     = {english},
  keywords     = {GUI, niobium, target, plasma, SRF},
  venue        = {Albuquerque, NM, USA},
  series       = {International Particle Accelerator Conference},
  number       = {5},
  publisher    = {JACoW Publishing, Geneva, Switzerland},
  month        = {10},
  year         = {2022},
  issn         = {2673-7000},
  isbn         = {978-3-95450-232-5},
  doi          = {10.18429/JACoW-NAPAC2022-MOPA62},
  url          = {https://jacow.org/napac2022/papers/mopa62.pdf},
  abstract     = {{In this work, we present two configurations of a novel radial magnetron design that are suitable for coating the complex inner surfaces of a variety of modern particle accelerator components. These devices have been used in conjunction with high-power impulse magnetron sputtering (HiPIMS) to deposit copper and niobium films onto the inner surfaces of bellows assemblies, waveguides, and SRF cavities. These films, with thicknesses of up to 3 µm and 40 µm for niobium and copper, respectively, have been shown to be conformal, adherent, and conductive. In the case of copper, the post-bake RRR values of the resulting films are well within the range specified for electroplating of the LCLS-II bellows and CEBAF waveguide assemblies. In addition to requiring no chemical processing beyond a detergent rinse and solvent degrease, this magnetron design exhibits over 80% target material utilization. Further, in the case of niobium, an enhancement in RRR over that of the bulk (target) material has been observed.}},
}