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TY - CONF AU - Shakel, M.S. AU - Cao, W. AU - Elsayed-Ali, H. AU - Eremeev, G.V. AU - Pudasaini, U. AU - Sayeed, Md.N. AU - Valente-Feliciano, A-M. ED - Biedron, Sandra ED - Simakov, Evgenya ED - Milton, Stephen ED - Anisimov, Petr M. ED - Schaa, Volker R.W. TI - Nb₃Sn Coating of a 2.6 GHz SRF Cavity by Sputter Deposition Technique J2 - Proc. of NAPAC2022, Albuquerque, NM, USA, 07-12 August 2022 CY - Albuquerque, NM, USA T2 - International Particle Accelerator Conference T3 - 5 LA - english AB - Nb₃Sn is of interest as a coating for SRF cavities due to its higher transition temperature Tc ~18.3 K and superheating field Hsh ~400 mT, both are twice that of Nb. Nb₃Sn coated cavities can achieve high-quality factors at 4 K and can replace the bulk Nb cavities operated at 2 K. A cylindrical magnetron sputtering system was built, commissioned, and used to deposit Nb₃Sn on the inner surface of a 2.6 GHz single-cell Nb cavity. With two identical cylindrical magnetrons, this system can coat a cavity with high symmetry and uniform thickness. Using Nb-Sn multilayer sequential sputtering followed by annealing at 950°C for 3 hours, polycrystalline Nb₃Sn films were first deposited at the equivalent positions of the cavity’s beam tubes and equator. The film’s composition, crystal structure, and morphology were characterized by energy dispersive spectroscopy, X-ray diffraction, and atomic force microscopy. The Tc of the films was measured by the four-point probe method and was 17.61 to 17.76 K. Based on these studies, ~1.2 micron thick Nb₃Sn was deposited inside a 2.6 GHz Nb cavity. We will discuss first results from samples and cavity coatings, and the status of the coating system. PB - JACoW Publishing CP - Geneva, Switzerland SP - 691 EP - 694 KW - cavity KW - SRF KW - site KW - target KW - plasma DA - 2022/10 PY - 2022 SN - 2673-7000 SN - 978-3-95450-232-5 DO - doi:10.18429/JACoW-NAPAC2022-WEPA30 UR - https://jacow.org/napac2022/papers/wepa30.pdf ER -