JACoW is a publisher in Geneva, Switzerland that publishes the proceedings of accelerator conferences held around the world by an international collaboration of editors.
TY - CONF AU - Huber, W.M. AU - Haehnlein, I. AU - Houlahan, T.J. AU - Jurczyk, B.E. AU - Morrice, A.S. AU - Stubbers, R.A. ED - Biedron, Sandra ED - Simakov, Evgenya ED - Milton, Stephen ED - Anisimov, Petr M. ED - Schaa, Volker R.W. TI - High Quality Conformal Coatings on Accelerator Components via Novel Radial Magnetron with High-Power Impulse Magnetron Sputtering J2 - Proc. of NAPAC2022, Albuquerque, NM, USA, 07-12 August 2022 CY - Albuquerque, NM, USA T2 - International Particle Accelerator Conference T3 - 5 LA - english AB - In this work, we present two configurations of a novel radial magnetron design that are suitable for coating the complex inner surfaces of a variety of modern particle accelerator components. These devices have been used in conjunction with high-power impulse magnetron sputtering (HiPIMS) to deposit copper and niobium films onto the inner surfaces of bellows assemblies, waveguides, and SRF cavities. These films, with thicknesses of up to 3 µm and 40 µm for niobium and copper, respectively, have been shown to be conformal, adherent, and conductive. In the case of copper, the post-bake RRR values of the resulting films are well within the range specified for electroplating of the LCLS-II bellows and CEBAF waveguide assemblies. In addition to requiring no chemical processing beyond a detergent rinse and solvent degrease, this magnetron design exhibits over 80% target material utilization. Further, in the case of niobium, an enhancement in RRR over that of the bulk (target) material has been observed. PB - JACoW Publishing CP - Geneva, Switzerland SP - 182 EP - 184 KW - GUI KW - niobium KW - target KW - plasma KW - SRF DA - 2022/10 PY - 2022 SN - 2673-7000 SN - 978-3-95450-232-5 DO - doi:10.18429/JACoW-NAPAC2022-MOPA62 UR - https://jacow.org/napac2022/papers/mopa62.pdf ER -