JACoW is a publisher in Geneva, Switzerland that publishes the proceedings of accelerator conferences held around the world by an international collaboration of editors.
TY - CONF AU - Gaitan, G. AU - Bishop, P. AU - Holic, A.T. AU - Kulina, G. AU - Liepe, M. AU - Sears, J. AU - Sun, Z. AU - Wendland, B.W. ED - Biedron, Sandra ED - Simakov, Evgenya ED - Milton, Stephen ED - Anisimov, Petr M. ED - Schaa, Volker R.W. TI - Development of a CVD System for Next-Generation SRF Cavities J2 - Proc. of NAPAC2022, Albuquerque, NM, USA, 07-12 August 2022 CY - Albuquerque, NM, USA T2 - International Particle Accelerator Conference T3 - 5 LA - english AB - Next-generation, thin-film surfaces employing Nb₃Sn, NbN, NbTiN, and other compound superconductors are destined to allow reaching superior RF performance levels in SRF cavities. Optimized, advanced deposition processes are required to enable high-quality films of such materials on large and complex-shaped cavities. For this purpose, Cornell University is developing a remote plasma-enhanced chemical vapor deposition (CVD) system that facilitates coating on complicated geometries with a high deposition rate. This system is based on a high-temperature tube furnace with a clean vacuum and furnace loading system. The use of plasma alongside reacting precursors will significantly reduce the required processing temperature and promote precursor decomposition. The system can also be used for annealing cavities after the CVD process to improve the surface layer. The chlorine precursors have the potential to be corrosive to the equipment and pose specific safety concerns. A MATLAB GUI has been developed to control and monitor the CVD system at Cornell. PB - JACoW Publishing CP - Geneva, Switzerland SP - 372 EP - 374 KW - cavity KW - controls KW - SRF KW - GUI KW - vacuum DA - 2022/10 PY - 2022 SN - 2673-7000 SN - 978-3-95450-232-5 DO - doi:10.18429/JACoW-NAPAC2022-TUPA15 UR - https://jacow.org/napac2022/papers/tupa15.pdf ER -