|MOPA62||High Quality Conformal Coatings on Accelerator Components via Novel Radial Magnetron with High-Power Impulse Magnetron Sputtering||182|
Funding: This material is based upon work supported by the U.S. Department of Energy under Award Numbers DE-SC0019784 and DE-SC0020481.
In this work, we present two configurations of a novel radial magnetron design that are suitable for coating the complex inner surfaces of a variety of modern particle accelerator components. These devices have been used in conjunction with high-power impulse magnetron sputtering (HiPIMS) to deposit copper and niobium films onto the inner surfaces of bellows assemblies, waveguides, and SRF cavities. These films, with thicknesses of up to 3 µm and 40 µm for niobium and copper, respectively, have been shown to be conformal, adherent, and conductive. In the case of copper, the post-bake RRR values of the resulting films are well within the range specified for electroplating of the LCLS-II bellows and CEBAF waveguide assemblies. In addition to requiring no chemical processing beyond a detergent rinse and solvent degrease, this magnetron design exhibits over 80% target material utilization. Further, in the case of niobium, an enhancement in RRR over that of the bulk (target) material has been observed.
|DOI •||reference for this paper ※ doi:10.18429/JACoW-NAPAC2022-MOPA62|
|About •||Received ※ 02 August 2022 — Revised ※ 05 August 2022 — Accepted ※ 09 August 2022 — Issue date ※ 21 August 2022|
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